Kinetic Monte Carlo Study of Low Pressure Chemical Vapor Deposition SiNx Thin Films Deposit Phase

Nanomedicine & Nanotechnology Open Access (NNOA)
ISSN: 2574-187X

Research Article

Kinetic Monte Carlo Study of Low Pressure Chemical Vapor Deposition SiNx Thin Films Deposit Phase

Authors: Bouhadiche A* and Benghorieb S

DOI: 10.23880/nnoa-16000210

Volume 6, Issue 2

Abstract

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